HEIDENHAIN, a leading manufacturer of linear and angular encoders, position displays and numerical controls, has introduced innovative linear encoders conceived for applications in high vacuum and ultra-high vacuum. The components used on these systems were adapted to the requirements of the vacuum class, particularly with respect to the housing, the printed circuit boards, and the adhesive.
While the standard encoders from HEIDENHAIN are suited for low and medium vacuum, high and ultrahigh vacuum place special requirements on encoders for positioning tasks. With their specialized design measures, the linear encoders created by HEIDENHAIN primarily for use in this area satisfy these special demands in vacuum.
The measures include:
• Vacuum-compatible PCBs, adhesives and paints for reducing outgassing
• Vented hollow spaces to reduce the pumping time
• Laser inscription instead of labels
• Tolerance to high bake-out temperatures
• Absence of ferromagnetic materials increases process reliability
• Special vacuum cable
• Special cleaning of components and production in a clean room for utmost cleanliness
HEIDENHAIN encoders for vacuum technology consist of a glass scale, a scanning head and the interface electronics (APE). Fixing clamps, fixed point holders, vacuum feedthrough, vacuum adhesive and extension cables are available as accessories. Widely known applications both for linear and angular encoders in a vacuum include electron microscopes, manipulators, multiple actuators, XY tables, cathode-ray microscopes, wafer inspection in the semi-conductor industry, or spectrometer axes for measuring synchrotron radiation.
Vacuum technology plays a significant role in many modern production procedures and research tasks. Procedures using vacuum technology have become indispensable in the electronics industry and biotechnology, in thin-film deposition technology, in the development of new materials, and in medicine and analytical technology. The vacuum systems from HEIDENHAIN are available in three encoder versions—LIF 481V, LIP 481V and LIP 481U. They differ essentially in accuracy, vacuum class, bake-out temperature, electrical connection and production environment.
The word “vacuum” is used to describe an empty space, meaning a volume not filled with air or any other gas. A vacuum is classified as a rough, fine, high or ultrahigh vacuum, depending on its purity. The smaller the amount of air in an enclosed space, i.e. the lower the pressure, the higher the resulting vacuum is classified. An atmospheric pressure above 1 mbar is called a rough vacuum; below 1 mbar one speaks of a fine vacuum. A vacuum below 0.001 mbar is a high vacuum, and at 0.000 000 1 mbar or less it is called an ultrahigh vacuum.
A vacuum in the sense of enclosures free of air and therefore also of suspended particles is required wherever the presence of “foreign” particles must be prevented. In some cases, dimensional measurements are required within the area of a vacuum, for example if very fine structures must be inspected in the submicron range or particles must be split and examined.
DR. JOHANNES HEIDENHAIN GmbH in Traunreut, Germany, develops and manufactures linear and angular encoders, rotary encoders, digital readouts, and numerical controls. Besides machine tools builders, its customers include manufacturers of automated machines and systems, in particular for semiconductor and electronics manufacturing.
A large number of customized solutions for users bear witness to HEIDENHAIN’s competence in the area of linear and angular metrology. These include the measuring and test equipment developed and built for many of the world’s standards laboratories and the angular encoders for various telescopes and satellite receiving antennas. The high quality of standard of HEIDENHAIN is documented through certification in the DIN ISO 9001 quality systems model and by authorization as German Calibration Service (DKD) inspection station for units of length and angle.
DR. JOHANNES HEIDENHAIN GmbH
Dr.-Johannes-Heidenhain-Str. 5 • 83301 Traunreut, Germany
Tel. +49 86 69 31 0 • Fax +49 86 69 50 61
info@heidenhain.de
www.heidenhain.de